Methods of  fabricating semiconductor structures and high electron mobility transistors

ABSTRACT

A method of fabricating a semiconductor structure includes forming a GaN-based semiconductor layer on a substrate, forming a silicon-containing insulating layer on the GaN-based semiconductor layer, forming a recess in the silicon-containing insulating layer in a first etching step, wherein the first etching step is performed by using a fluorine-containing etchant and applying a first bias power, and enlarging the recess to extend into the GaN-based semiconductor layer in a second etching step, wherein the second etching step is performed by using the same fluorine-containing etchant as the first etching step and applying a second bias power that is greater than the first bias power. In addition, a method of fabricating a high electron mobility transistor is provided.

BACKGROUND Technical Field

The disclosure relates to semiconductor fabricating technologies, andmore particularly, to etching processes for methods of fabricatingsemiconductor structures.

Description of the Related Art

Gallium nitride-based (GaN-based) semiconductor materials have manyexcellent characteristics, such as high thermal resistance, wideband-gap, and a high electron saturation rate. Therefore, GaN-basedsemiconductor materials are suitable for use in high-speed andhigh-temperature operating environments. In recent years, GaN-basedsemiconductor materials have been widely used in light-emitting diode(LED) elements and high-frequency elements, such as high electronmobility transistors (HEMT) with heterogeneous interfacial structures.

With the developments of GaN-based semiconductor materials, thesephotoelectric elements which use GaN-based semiconductor materials areapplied in the more critical working environments, such as those withhigher frequencies or higher temperatures. Therefore, the processconditions of fabricating semiconductor elements with GaN-basedsemiconductor materials face various new challenges.

SUMMARY

Some embodiments of the present disclosure provide a method offabricating a semiconductor structure. The method includes forming aGaN-based semiconductor layer on a substrate, forming asilicon-containing insulating layer on the GaN-based semiconductorlayer, and forming a recess in the silicon-containing insulating layerin a first etching step, wherein the first etching step is performed byusing a fluorine-containing etchant and applying a first bias power. Themethod further includes enlarging the recess to extend into theGaN-based semiconductor layer in a second etching step, wherein thesecond etching step is performed by using the same fluorine-containingetchant as the first etching step and applying a second bias power thatis greater than the first bias power.

Some embodiments of the present disclosure provide a method offabricating a high electron mobility transistor (HEMT). The methodincludes forming a GaN semiconductor layer over a substrate, forming aAlGaN semiconductor layer on the GaN semiconductor layer, forming asilicon-containing insulating layer on the AlGaN semiconductor layer,and forming a first recess and a second recess in the silicon-containinginsulating layer in a first etching step, wherein the first etching stepis performed by using a fluorine-containing etchant and applying a firstbias power. The method further includes enlarging the first recess andthe second recess to extend into the AlGaN semiconductor layer in asecond etching step, wherein the second etching step is performed byusing the same fluorine-containing etchant as the first etching step andapplying a second bias power that is greater than the first bias power.The method also includes forming a source contact and a drain contact inthe first recess and the second recess respectively, and forming a gatecontact between the source contact and the second contact.

A detailed description is given in the following embodiments withreference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments of the disclosure can be more fully understood byreading the subsequent detailed description and examples with referencesmade to the accompanying drawings. For clarity of illustration, variouselements in the drawings may not be drawn in scale, wherein:

FIGS. 1A-1E illustrate cross-sectional views of intermediate stages of amethod of fabricating a semiconductor structure in accordance with someembodiments of the present disclosure;

FIG. 2 illustrates a flowchart of a method of fabricating asemiconductor structure in accordance with some embodiments of thepresent disclosure;

FIG. 3 shows a graph of an etching rate of a GaN-based semiconductorlayer etched by a fluorine-containing etchant and an applied bias powerin accordance with some embodiments of the present disclosure;

FIGS. 4A-4E illustrate cross-sectional views of intermediate stages of amethod of fabricating a high electron mobility transistor (HEMT) inaccordance with some other embodiments of the present disclosure; and

FIG. 5 is a cross-sectional view of a high electron mobility transistor(HEMT) in accordance with another embodiment of the present disclosure.

DETAILED DESCRIPTION

The following description provides various embodiments, or examples, forimplementing different features of the present disclosure. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

FIGS. 1A-1E illustrate cross-sectional views of intermediate stages of amethod of fabricating a semiconductor structure 100 shown in FIG. 1E inaccordance with some embodiments of the present disclosure. The varioussteps of FIGS. 1A-1E are schematically reflected in the various steps ofthe flowchart of a method 600 shown in FIG. 2 for fabricating thesemiconductor structure 100. Referring to FIG. 1A, a substrate 101 isprovided, and a GaN-based semiconductor layer 102 is formed on thesubstrate 101. Then, a silicon-containing insulating layer 104 is formedon the GaN-based semiconductor layer 102, and a patterned mask layer 106is formed on the silicon-containing insulating layer 104. The patternedmask layer 106 has an opening 107, and the opening 107 exposes a portionof the upper surface of the silicon-containing insulating layer 104. Therespective step is illustrated in step 602 of the method 600 shown inFIG. 2.

In some embodiments of the present disclosure, the substrate 101 may bea doped (such as doped with a p-type or an n-type dopant) or an undopedsemiconductor substrate, such as a silicon substrate, a silicongermanium substrate, a gallium arsenide substrate or the like. In someembodiments, the substrate 101 may be a semiconductor-on-insulatorsubstrate, such as a silicon-on-insulator (SOI) substrate. In someembodiments, the substrate 101 may be a silicon carbide (SiC) substrateor a sapphire substrate. The selection of the substrate 101 may dependon the type of the semiconductor device to which the semiconductorsubstrate 100 is applied subsequently.

In some embodiments of the present disclosure, the material of theGaN-based semiconductor layer 102 may be GaN, Al_(x)Ga_(1-x)N (wherein0<x<1), In_(x)Ga_(1-x)N (wherein 0<x<1), In_(x)Al_(y)Ga_(1-x-y)N(wherein 0<x+y<1), a combination thereof, a multilayered structurethereof, or the like. The GaN-based semiconductor layer 102 may beformed using an epitaxial growth process, such as metal organic chemicalvapor deposition (MOCVD), hydride vapor phase epitaxy (HVPE), molecularbeam epitaxy (MBE), a combination thereof, or the like. In someembodiments, the GaN-based semiconductor layer 102 may have a dopant,such as an n-type or a p-type dopant. The GaN-based semiconductor layer102 with the dopant may be formed by in-situ doping during the epitaxialgrowth process.

In some embodiments of the present disclosure, the material of thesilicon-containing insulating layer 104 may be silicon oxide, siliconnitride, silicon oxynitride, a combination of thereof, or the like. Thesilicon-containing insulating layer 104 may be formed by thermaloxidation, chemical vapor deposition (CVD), plasma enhanced CVD (PECVD),atomic layer deposition (ALD) or the like.

In some embodiments of the present disclosure, the mask layer 106 may bea photoresist layer, a hard mask layer (such as a nitride layer) or acombination thereof. In some embodiments, a bottom anti-reflectivecoating (BARC) layer (not shown) may be formed on the silicon-containinginsulating layer 104 following by forming a material layer of the masklayer 106 on the BARC layer. Once the material layer of the mask layer106 is formed, an opening 107 is formed in the material layer of themask layer 106 by using photolithography technique, and the opening 107exposes a portion of the upper surface of the silicon-containinginsulating layer 104.

Referring to FIG. 1B, the substrate 101 with the GaN-based semiconductorlayer 102, the silicon-containing insulating layer 104 and the masklayer 106 formed thereon, is placed into an etching equipment 501, andthen an etching process 500 is performed. In some embodiments of thepresent disclosure, the silicon-containing insulating layer 104 and theunderlying GaN-based semiconductor layer 102 are etched through theopening 107 of the mask layer 106 to form a recess 108 (shown in FIG.1D) in the silicon-containing insulating layer 104 and the GaN-basedsemiconductor layer 102. In some embodiments, the etching process 500may be a dry etching process, such as reactive ion etching (RIE),electron cyclotron resonance (ECR) etching, inductively-coupled plasma(ICP) etching or the like.

In some embodiments, as shown in FIG. 1B, the etching equipment 501includes an etching chamber 502, a gas supply system 503, a bias powergenerator 504, a wafer platform 505, a shower head 506 and an etchingendpoint detector 507.

The gas supply system 501 of the etching equipment 501 may provide anetchant which is used in the etching process 500, and the etchant isevenly dispersed into the etching chamber 502 through the shower head506.

The bias power generator 504 of the etching equipment 501 may apply abias power to the etching chamber 501 to generate a bias electric fieldbetween the upper electrode (not shown, generally disposed at the top ofthe etching chamber 502) and lower electrode (not shown, generallydisposed inside of the wafer platform 505) of the etching equipment 501.The etchant is accelerated by the bias electric field in the etchingchamber 502, and in the direction toward the wafer platform 505 toanisotropically etch the silicon-containing insulating layer 104 and theunderlying GaN-based semiconductor layer 102.

The etching endpoint detector 507 of the etching equipment 501 mayreal-time monitor etching signals of the desired material layer to beremoved in an etching process. When the etching endpoint detector 507detects the etching endpoint of the desired material layer to beremoved, the other underlying material layer begins to be exposed fromthe desired material layer to be removed. The period of the etchingprocess which is from the initiation of the etching process to theetching endpoint detected by the etching endpoint detector 507 isreferred to as the main-etching. In general, in order to completelyremove the overlying material layer, an over-etching may be continuallyperformed for a period after the main etching of the etching process.For example, the over-etching may be performed for a duration about 5%to 30% of that of the main etching.

Referring to FIG. 1C, after the substrate 101 with the GaN-basedsemiconductor layer 102, the silicon-containing insulating layer 104 andthe mask layer 106 formed thereon, is placed on the wafer platform 505of the etching equipment 501, a first etching step 500A of the etchingprocess 500 is performed. The respective step is illustrated in step 604of the method 600 shown in FIG. 2. In some embodiments of the presentdisclosure, a recess 108′ is formed in the silicon-containing insulatinglayer 104 by the first etching step 500A. The first etching step 500Amay be performed by using a fluorine-containing etchant, such as CF₄,CHF₃, CH₂F₂, CH₃F or a combination thereof, and may be performed byapplying a first bias power in a range of about 100 W to about 500 W tothe etching chamber 502. It should be noted that, when the first biaspower is set lower than 100 W, the fluorine-containing etchant isincapable of etching the silicon-containing insulating layer 104. Whenthe first bias power is set greater 500 W, the etching rate of thesilicon-containing insulating layer 104 by the fluorine-containingetchant is too high which results in poor etching uniformity of thesilicon-containing insulating layer 104 by the first step 500A of theetching process 500. This is disadvantageous for a following secondetching step 500B performed on the GaN-based semiconductor layer 102.

Referring to FIG. 1D, after the first etching step 500A of the etchingprocess 500, the second etching step 500B of the etching process 500 isperformed. The respective step is illustrated in step 606 of the method600 shown in FIG. 2. In some embodiments of the present disclosure, thefirst etching step 500A and the second etching step 500B are performedin-situ in the same etching chamber 502. In other words, after the firstetching step 500A is complete, the substrate 101 is not moved out of theetching chamber 502 and the second etching step 500B is continuouslyperformed in the etching chamber 502 without interruption. In someembodiments, the recess 108′ as shown in FIG. 1C is enlarged to extendinto the GaN-based semiconductor layer 102 by the second etching step500B to form a recess 108 as shown in FIG. 1D. The second etching step500B is performed by using the same fluorine-containing etchant as thatused in the first etching step 500A and is performed by applying asecond bias power that is greater than the first bias power to theetching chamber 502.

Referring to FIG. 3, it shows a graph of an etching rate of theGaN-based semiconductor layer 102 by the fluorine-containing etchant andthe applied bias power in accordance with some embodiments of thepresent disclosure. As shown in FIG. 3, when the second bias power isset between 0 W and 1000 W, the etching rate of the GaN-basedsemiconductor layer 102 by the fluorine-containing etchant is almostzero. When the second bias power is set between 1000 W and 1350 W, theetching rate of the GaN-based semiconductor layer 102 by thefluorine-containing etchant gradually increases as increasing the secondbias power. When the second bias power is set greater than 1350 W, theetching rate of the GaN-based semiconductor layer 102 by thefluorine-containing etchant is too high which results in poor etchinguniformity of the GaN-based semiconductor layer 102 by the secondetching step 500B of the etching process 500. Moreover, the latticestructure of the surface of the GaN-based semiconductor layer 102exposed from the recess 108 may be destroyed by the fluorine-containingetchant. Therefore, in some embodiments of the present disclosure, thesecond bias power of the second etching step 500B may be in a range ofabout 1000 W to about 1350 W.

In accordance with some embodiments of the present disclosure, in thefirst etching step 500A, an etching selectivity of thesilicon-containing insulating layer 102 to the GaN-based semiconductorlayer 104 is greater than 10 and lower than 1000. Therefore, in someembodiments, the first etching step 500A may include an over-etchingperformed on the silicon-containing insulating layer 104. In theseembodiments, the silicon-containing insulating layer 104 may be removedcompletely in the first etching step 500A approximately without etchingthe underlying GaN-based semiconductor layer 102.

In some embodiments of the present disclosure, the first etching step500A does not perform an over-etching on the silicon-containinginsulating layer 104. Since the range of the second bias power of thesecond etching step 500B is larger than that of the first bias power ofthe first etching step 500A. Therefore, in this embodiment, theremaining portion of the silicon-containing insulating layer 104 that isnot removed by the main etching of the first etching step 500A may beremoved by the second etching step 500B. In this embodiment, since thefirst etching step 500A may be performed without an over-etching, theprocess time of the etching process 500 can be shortened, which enhancesthe production efficiency of the semiconductor structure 100.

In addition, in some embodiments, the second etching step 500B may becontinuously performed without interruption after the first etching step500A is complete. In another embodiment, a ramping step may additionallybe performed between the first etching step 500A and the second etchingstep 500B in the etching process 500, for example, setting the biaspower at a value between the first bias power and the second bias power.

Referring to FIG. 1E, after the second etching step 500B of the etchingprocess 500, an ashing process may be performed to remove the mask layer106 on the silicon-containing insulating layer 104 to form thesemiconductor structure 100. In the embodiments of the presentdisclosure, the semiconductor structure 100 includes the substrate 101,the GaN-based semiconductor layer 102 on the substrate 101, thesilicon-containing insulating layer 104 on the GaN-based semiconductorlayer 102, and the recess 108 in the silicon-containing insulating layer104 and the GaN-based semiconductor layer 102. It should be noted that,the embodiments of the present disclosure are implemented bysequentially etching the silicon-containing insulating layer 104 and theGaN-based semiconductor layer 102 with the first etching step 500A andthe second etching step 500B of the etching process 500 to form recess108, wherein the first etching step 500A and the second etching step500B are performed by using the same etchant and applying different biaspowers in the same etching chamber 502.

In the known etching methods, the etching process for a GaN-basedsemiconductor layer uses a chlorine-containing etchant, such as Cl₂, andthe etching process for a silicon-containing insulating layer uses afluorine-containing etchant, such as CF₄. Therefore, in the knownetching methods, it requires two etching equipment to performed etchinga silicon-containing insulating layer and etching a GaN-basedsemiconductor layer are respectively.

In accordance with embodiments of the present disclosure, the secondetching step 500B of the etching process 500 are performed by using thesame fluorine-containing etchant as the first etching step 500A andapplying the second bias power greater than the first bias power to etchthe GaN-based semiconductor layer 102, so that etching thesilicon-containing insulating layer 104 and etching the GaN-basedsemiconductor layer 102 can be sequentially performed in the sameetching chamber 502. Therefore, in accordance with the method of theembodiments of the present disclosure for forming the semiconductorstructure by in-situ etching the silicon-containing insulating layer andthe GaN-based semiconductor layer, the production efficiency ofsemiconductor devices containing the semiconductor structure can beenhanced.

In addition, the embodiments of the present disclosure can also avoidthe problem caused by an undesirable native oxide formed on the surfaceof the GaN-based semiconductor layer 102 during the period between thetwo etching processes. Therefore, the semiconductor structure formed bythe etching process of in-situ etching the silicon-containing insulatinglayer and the GaN-based semiconductor layer according to the embodimentsof the present disclosure can enhance the reliability of thesemiconductor device containing this semiconductor structure.

The embodiment shown in FIGS. 1A-1E is merely an example, and theembodiments of the present disclosure are not to be limited. In additionto the above-mentioned embodiment shown in FIGS. 1A-1E, the embodimentsof the present disclosure may be applied to other semiconductorstructures.

FIGS. 4A-4E illustrates cross-sectional views of intermediate stages ofa method of fabricating a high electron mobility transistor (HEMT) 200as shown in FIG. 4E in accordance with some embodiments of the presentdisclosure. With respect to FIG. 4A, a substrate 201 is provided. Thesubstrate 201 may be similar to the substrate 101 of the aforementionedFIGS. 1A-1E.

Next, a buffer layer 202 is formed on the substrate 201. The bufferlayer 202 may be helpful to mitigate a stain of a GaN semiconductorlayer 204 which is subsequently formed above the buffer layer 202, andto prevent defects formed in the overlying GaN semiconductor layer 204.The stain is caused by a mismatch between the GaN semiconductor layer204 and the substrate 201. In some embodiments of the presentdisclosure, the material of the buffer layer 202 may be AlN, GaN,Al_(x)Ga_(1-x)N (wherein 0<x<1), a combination thereof, or the like. Thebuffer layer 202 may be formed by an epitaxial growth process, such asMOCVD, HVPE, MBE, a combination thereof, or the like. Although in theembodiment shown in FIG. 4A the buffer layer 202 is a single layer, thebuffer layer 202 may also be a multilayered structure.

Next, the GaN semiconductor layer 204 is formed on the buffer layer 202,and an AlGaN semiconductor layer 206, for example Al_(x)Ga_(1-x)N(wherein 0<x<1) is formed on the GaN semiconductor layer 204. There is aheterogeneous interface between the GaN semiconductor layer 204 andAlGaN semiconductor layer 206 so that two-dimensional electron gas (2DEG, not shown) is formed at the heterogeneous interface. Therefore, theHEMT 200 as shown in FIG. 4E may utilize 2 DEG as conductive carriers.In some embodiments of the present disclosure, the GaN semiconductorlayer 204 and the AlGaN semiconductor layer 206 may be formed byepitaxial growth processes, such as MOCVD, HVPE, MBE, or a combinationthereof. In some embodiments, the GaN semiconductor layer 204 and theAlGaN semiconductor layer 206 may have dopants, such as n-type or p-typedopants.

Next, a silicon-containing insulating layer 208 is formed on the AlGaNsemiconductor layer 206. In some embodiments of the present disclosure,the silicon-containing insulating layer 208 may be a high-quality filmformed by using ALD, thermal oxidation or similar deposition processes.The material of the silicon-containing insulating layer 208 may besilicon oxide, silicon nitride, silicon oxynitride, a combinationthereof, or the like. The formation of the high-quality film of thesilicon-containing insulating layer 208 on the AlGaN semiconductor layer206 can prevent leak currents of a source contact 220, a drain contact222 and a gate contact 228 (shown in FIG. 4E) that are subsequentlyformed.

Still referring to FIG. 4A, a material layer of a mask layer 210 isformed on the silicon-containing insulating layer 208. A first opening212 and a second opening 214 are then formed in the material layer ofthe mask layer 210 by photolithographic technology. The first opening212 and the second opening 214 expose a portion of the upper surface ofthe silicon-containing insulating layer 208.

Next, the substrate 201 with the buffer layer 202, the GaN semiconductorlayer 204, the AlGaN semiconductor layer 206, the silicon-containinginsulating layer 208 and mask layer 210 formed thereon, is placed intothe etching equipment 501 as shown in FIG. 1B, and an etching process510 is performed. Referring to FIGS. 4B and 4C, in some embodiments ofthe present disclosure, the etching process 510 includes a first etchingstep 510A and a second etching step 510B. The first etching step 510Aand the second etching step 510B of the etching process 510 may berespectively similar to the first etching step 500A and the secondetching step 500B of the etching process 500 as shown in FIGS. 1C and1D.

In the embodiments of the present disclosure, the silicon-containinginsulating layer 208 and the AlGaN semiconductor layer 206 are etchedthrough the first opening 212 and the second opening 214 of the masklayer 210 to form a first recess 216 and a second recess 218 as shown inFIG. 4C.

In detail, as shown in FIG. 4B, a first recess 216′ and a second recess218′ are formed in the silicon-containing insulating layer 208 by thefirst etching step 510A of the etching process 510. The first etchingstep 510A of the etching process 510 may use the same etchant and thesame range of bias power as those used in the first etching step 500A ofthe etching process 500 of the aforementioned FIG. 1C. Next, as shown inFIG. 4C, the first recess 216′ and the second recess 218′ are enlargedto extend into the AlGaN semiconductor layer 206 by the second etchingstep 510B of the etching process 510 to form the first recess 216 andthe second recess 218. The second etching step 510B of the etchingprocess 510 may use the same etchant and the same range of bias power asthose of the second etching step 500B of the etching process 500 of theaforementioned FIG. 1D.

In some embodiments, as shown in FIG. 4C, the first recess 216 and thesecond recess 218 extend into the AlGaN semiconductor layer 206 by adistance D1. The distance D1 may be between about 5% and about 100% ofthe thickness T1 of the AlGaN semiconductor layer 206. The distance D1may depend on carrier concentration and the carrier mobility of 2 DEGused in the HEMT 200.

Referring to FIG. 4D, after the etching process 510, an ashing processmay be performed to remove the mask layer 210 on the silicon-containinginsulating layer 208.

Referring to FIG. 4E, a source contact 220 and a drain contact 222 arethen formed in the first recess 216 and the second recess 218respectively. The source contact 220 and the drain contact 222 arelocated on and electrically contact the AlGaN semiconductor layer 206.In some embodiments, the first recess 216 and the second recess 218 maybe incompletely filled with the source drain contact 220 and the draincontact 222. The source contact 220 and the drain contact 222 are formedalong the sidewalls and the bottom surfaces of the first recess 216 andthe second recess 218, and extend onto a portion of the surface of thesilicon-containing insulating layer 208. In some embodiments, thematerials of the source contact 220 and the drain contact 222 may beconductive materials, such as Au, Ni, Pt, Pd, Ir, Ti, Cr, W, Al, Cu,TaN, TiN, WSi₂, a combination thereof, or the like. The source contact220 and the drain contact 222 may be formed by ALD, CVD, PVD,sputtering, or the like. In some embodiments, the source contact 220 andthe drain contact 222 may be formed together in the same depositionprocess.

Next, a passivation layer 224 is formed on the source contact 220 andthe drain contact 222. The passivation layer 224 covers the sourcecontact 220 and the drain contact 222. In some embodiments of thepresent disclosure, the material of the passivation layer 224 may besilicon oxide, silicon nitride, silicon oxynitride, a combination ofthereof, or the like. In some embodiments, the passivation layer 224 maybe formed by CVD, PECVD, ALD or the like.

Still referring to FIG. 4E, a third recess 226 is formed in thepassivation layer 224 by photolithography technology and an etchingprocess. The third recess 226 is located between the source contact 220and the drain contact 222. Next, a gate contact 228 is formed in thethird recess 226 to form a HEMT 200. In some embodiments, the gatecontact 228 is located on the silicon-containing insulating layer 208and between the source contact 220 and the drain contact 222. In someembodiments, the third recess 226 may be incompletely filled with thegate contact 228. The gate contact 228 is formed along the sidewalls andthe bottom surface of the third recess 226 and extended onto a portionof the surface of the passivation layer 224. In some embodiments, thematerial of the gate contact 228 may be a conductive material, such asAu, Ni, Pt, Pd, Ir, Ti, Cr, W, Al, Cu, TaN, TiN, WSi₂, or a combinationthereof. The gate contact 228 may be formed by ALD, CVD, PVD, sputteringor the like. The source contact 220 and the drain contact 222 may be inelectrical contact with external circuitry by a metal layer (not shown)that passes through the passivation layer 224.

Referring to FIG. 5, the difference between the embodiments shown inFIGS. 5 and 4E is that the third recess 226 in an HEMT 300 as shown inFIG. 5 is extended into the silicon-containing insulating layer 208 andthe AlGaN semiconductor layer 206. In the embodiments as shown in FIG.5, the passivation layer 224 is a silicon-containing insulatingmaterial. The passivation layer 224 and the silicon-containinginsulating layer 208 may be etched by an etching step similar to thefirst etching step 500A of the etching process 500 as shown in FIG. 1C.Next, the AlGaN semiconductor layer 206 may be etched by another etchingstep similar to the second etching step 500B of the etching process 500as shown in FIG. 1D to form the third recess 226. In this embodiment,the gate contact 228 is formed in the third recess 226, and the bottomsurface of the gate contact 228 is in direct contact with the AlGaNsemiconductor layer 206 to form the HEMT 300.

In addition, in another embodiment, the method of fabricating the HEMT300 further includes forming a gate structure (not shown) in the thirdrecess 226 and embedded in the AlGaN semiconductor layer 206 prior toforming the gate contact 228. Thereafter, the gate contact 228 is formedin the remaining portion of the third recess 226, and the gate contact228 is disposed on the gate structure. In some embodiments, the gatestructure may be a doped GaN semiconductor layer, such as n-type GaNsemiconductor layer or p-type GaN semiconductor layer. The gatestructure may be formed by an epitaxial growth process, such as MOCVD,HVPE, MBE, or a combination thereof.

In summary, the embodiments of present disclosure include forming arecess in the silicon-containing insulating layer by the first etchingstep of the etching process, and extending the recess into the GaN-basedsemiconductor layer by the second etching step of the etching process,wherein the second etching step are performed by using the samefluorine-containing etchant as the first etching step and applying thesecond bias power greater than the first bias power of the first etchingstep. As a result, etching the silicon-containing insulating layer andetching the GaN-based semiconductor layer can be sequentially performedin the same etching chamber. Therefore, in accordance with theembodiments of the present disclosure to form the semiconductorstructures by in-situ etching the silicon-containing insulating layerand the GaN-based semiconductor layer, the production efficiency ofsemiconductor devices containing the semiconductor structures can beenhanced.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A method of fabricating a semiconductor structure, comprising:forming a GaN-based semiconductor layer on a substrate; forming asilicon-containing insulating layer on the GaN-based semiconductorlayer; forming a recess in the silicon-containing insulating layer in afirst etching step, wherein the first etching step is performed by usinga fluorine-containing etchant and applying a first bias power; andenlarging the recess to extend into the GaN-based semiconductor layer ina second etching step, wherein the second etching step is performed byusing the fluorine-containing etchant and applying a second bias powerthat is greater than the first bias power.
 2. The method as claimed inclaim 1, wherein the GaN-based semiconductor layer comprises GaN, AlGaNor InGaN.
 3. The method as claimed in claim 1, wherein thesilicon-containing insulating layer comprises silicon oxide, siliconnitride, silicon oxynitride or a combination thereof.
 4. The method asclaimed in claim 1, wherein the first bias power is between 100 W and500 W.
 5. The method as claimed in claim 1, wherein the second biaspower is between 1000 W and 1350 W.
 6. The method as claimed in claim 1,wherein the fluorine-containing etchant comprises CF₄, CHF₃, CH₂F₂, CH₃For a combination thereof.
 7. The method as claimed in claim 1, whereinin the first etching step, an etching selectivity of thesilicon-containing insulating layer to the GaN-based semiconductor layeris greater than
 10. 8. The method as claimed in claim 1, wherein thefirst etching step and the second etching step are performed in-situ ina same etching chamber.
 9. The method as claimed in claim 8, wherein thesecond etching step is continuously performed after completion of thefirst etching step without interruption.
 10. The method as claimed inclaim 1, further comprising forming a mask layer on thesilicon-containing insulating layer after forming the silicon-containinginsulating layer and prior to performing the first etching step.
 11. Amethod of fabricating a high electron mobility transistor (HEMT),comprising: forming a GaN semiconductor layer over a substrate; formingan AlGaN semiconductor layer on the GaN semiconductor layer; forming asilicon-containing insulating layer on the AlGaN semiconductor layer;forming a first recess and a second recess in the silicon-containinginsulating layer in a first etching step, wherein the first etching stepis performed by using a fluorine-containing etchant and applying a firstbias power; enlarging the first recess and the second recess to extendinto the AlGaN semiconductor layer in a second etching step, wherein thesecond etching step is performed by using the fluorine-containingetchant and applying a second bias power that is greater than the firstbias power; forming a source contact and a drain contact in the firstrecess and the second recess respectively; and forming a gate contactbetween the source contact and the second contact.
 12. The method asclaimed in claim 11, wherein the silicon-containing insulating layercomprises silicon oxide, silicon nitride, silicon oxynitride or acombination thereof.
 13. The method as claimed in claim 11, wherein thefirst bias power is between 100 W and 500 W.
 14. The method as claimedin claim 11, wherein the second bias power is between 1000 W and 1350 W.15. The method as claimed in claim 11, wherein the fluorine-containingetchant comprises CF₄, CHF₃, CH₂F₂, CH₃F or a combination thereof. 16.The method as claimed in claim 11, wherein in the first etching step, anetching selectivity of the silicon-containing insulating layer to theAlGaN semiconductor layer is greater than
 10. 17. The method as claimedin claim 11, wherein the first etching step and the second etching stepare performed in-situ in a same etching chamber.
 18. The method asclaimed in claim 17, wherein the second etching step is continuouslyperformed after completion of the first etching step withoutinterruption.
 19. The method as claimed in claim 17, wherein there is noover-etching performed on the silicon-containing insulating layer whenthe first etching step proceeds to an etching end point of thesilicon-containing insulating layer.
 20. The method as claimed in claim11, wherein the gate contact is disposed in and in contact with theAlGaN semiconductor layer.